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Carbon Nanotube Wafer Core Process Platform

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Platform Introduction

This platform establishes end-to-end engineering capabilities covering carbon nanotube devices from process development to testing and validation. The platform integrates a complete front-end semiconductor manufacturing flow, spanning critical steps such as lithography, thin-film deposition, etching, and cleaning. It has developed specialized process modules tailored specifically to the material characteristics of carbon nanotubes, offering customers comprehensive, end-to-end technical services from process development to prototype manufacturing. Concurrently, the platform is equipped with systematic characterization capabilities ranging from material structural analysis and surface morphology characterization to device electrical performance testing. This forms a one-stop precision testing solution spanning from microstructure to macroscopic performance, building a complete closed-loop data feedback from material evaluation to device validation for R&D iteration and product qualification.

Core Advantages

Platform Equipment

  • Lithography Equipment
  • Deposition Equipment
  • Etching Equipment
  • Testing & Characterization Equipment
UV Aligner
UV Aligner
Laser Direct Writing System
Laser Direct Writing System
DUV Lithography System
DUV Lithography System
Fully Automated UV Aligner
Fully Automated UV Aligner
Atomic Layer Deposition (ALD) System
Atomic Layer Deposition (ALD) System
Plasma-Enhanced Chemical Vapor Deposition (PECVD) System
Plasma-Enhanced Chemical Vapor Deposition (PECVD) System
Physical Vapor Deposition (PVD) System
Physical Vapor Deposition (PVD) System
Electron Beam (E-beam) Evaporator
Electron Beam (E-beam) Evaporator
Oxygen Plasma Asher / Etcher
Oxygen Plasma Asher / Etcher
Reactive Ion Etching (RIE) System
Reactive Ion Etching (RIE) System
Ion Beam Etching (IBE) System
Ion Beam Etching (IBE) System
Vacuum High-Low Temperature Probe Station
Vacuum High-Low Temperature Probe Station
Atomic Force Microscope (AFM)
Atomic Force Microscope (AFM)
Fluorescence Spectrometer
Fluorescence Spectrometer
Scanning Electron Microscope (SEM)
Scanning Electron Microscope (SEM)
Raman Spectrometer
Raman Spectrometer
Semi-Automated Probe Station
Semi-Automated Probe Station
Semiconductor Parameter Analyzer
Semiconductor Parameter Analyzer
Technical Consultation

Carbon nanotube crystal round technology challenge, one click docking professional solution.

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